High-Density Vertical Transistors with Pitch Size Down to 20 nm.
Xiao Z, Liu L, Chen Y, Lu Z, Yang X, Gong Z, Li W, Kong L, Ding S, Li Z, Lu D, Ma L, Liu S, Liu X, Liu Y.
Xiao Z, et al. Among authors: chen y.
Adv Sci (Weinh). 2023 Oct;10(29):e2302760. doi: 10.1002/advs.202302760. Epub 2023 Aug 8.
Adv Sci (Weinh). 2023.
PMID: 37552811
Free PMC article.